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Synopsis: Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Author: gatiramsleaw1988
Tags: ebook
Posted: 30 March 2015
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